After the measurement process the wafer will be sorted softly according to the predefined quality criteria into polystyrene boxes. The sorting works with a cross lift station. If the wafer is in the middle of the cross belt the lift moves up and the cross belt transports the wafer into the box.

The sorter of Hennecke Systems achieves a speed of 1 wafer per second. A sorting module consists of 6 sorting stations for polystyrene boxes. If a polystyrene box is filled up the operator has to exchange it for an empty one. Hennecke Systems recommends to use at least two sorting units.

Hennecke Systems also offers a sorter for carriers.